Innolite will be working with German Extreme Technologies, owned by Lambda Physik and Jenoptik, as well as with a French industrial group made up by amongst others Alcatel and Thales Laser. These partners are to develop the necessary laser and optic components of the lithography light source system.
"This industrial connection is important to us. It will strengthen our credibility with potential customers," says Innolite's MD Bert Junno.
The Swedish light source is one of three light sources being tested in the project. In 2003 it will be decided which of the three light sources the project will focus on. The aim is set on a commercially viable light source for future mask production.
Gittan Cedervall